1 Rapid Thermal Processing Equipment Market Value and Product Definition
In 2025, the global Rapid Thermal Processing (RTP) Equipment market is forecasted to reach a total value of 1615.72 million USD. The Compound Annual Growth Rate (CAGR) from 2025 to 2035 is projected to be 7.02%. Rapid Thermal Processing Equipment refers to systems designed to heat materials, such as silicon wafers, to high temperatures (1,200 °C or more) in seconds or less, typically using high-intensity lamps or lasers. RTP was originally developed for ion implant anneal but has since expanded its applications to include oxidation, silicide formation, chemical vapor deposition, and advanced applications like modifying crystallographic phases to enhance properties, lattice interfaces, or stress relaxation. The market’s growth is driven by the increasing demand for efficient semiconductor manufacturing processes.
Figure Global Rapid Thermal Processing Equipment Market Size from 2020-2035
2 Rapid Thermal Processing Equipment Market Growth Drivers and Restraints
The growth of the rapid thermal processing equipment market is influenced by several key drivers and restraints. The primary drivers include the advantages of RTP equipment, such as lower manufacturing costs, high throughput, and process uniformity. RTP equipment provides uniform heating across the entire substrate, enabling precise control of material deposition and annealing processes. This results in optimal uniformity, especially for large wafer sizes. Additionally, the growing demand for advanced semiconductor devices across various industries, including electronics, automotive, and telecommunications, is a significant driver. The semiconductor industry’s continuous pursuit of miniaturization and higher device performance requires precise and efficient heat treatment, which RTP equipment can provide.
However, the market also faces certain restraints. One of the main challenges is the difficulty in achieving temperature control uniformity. Maintaining a uniform temperature distribution across the wafer while following rapid temperature trajectories is crucial. Financial, technical, and talent barriers also pose challenges. The semiconductor professional equipment industry is capital-intensive, requiring significant initial investment in R&D and a long cycle for mass production and profitability. Manufacturers need substantial financial support for new product research and development, introduction of high-end talents, and market expansion.
3 Rapid Thermal Processing Equipment Market Innovation and Corporate Restructuring
The Rapid Thermal Processing Equipment market is characterized by continuous technological innovation and corporate restructuring. Technological advancements include the development of advanced heating technologies, such as metal heating elements and rapid thermal annealing (RTA), which improve temperature control and uniform heating. Smart technology and sustainability are also becoming increasingly important, with manufacturers incorporating real-time process monitoring and control systems to optimize heat distribution and improve uniformity. Additionally, there is a growing focus on sustainability, with RTP equipment gradually improving energy efficiency and reducing environmental impact.
Corporate restructuring activities, such as mergers and acquisitions, are also shaping the market landscape. For example, Jipelec and Annealsys have merged to streamline their RTP product range, enhancing their market position. Plasma-Therm has redesigned its Heatpulse Rapid Thermal Processing platform to meet evolving market requirements, focusing on improved system reliability and performance. These strategic moves reflect the industry’s dynamic nature and the need for companies to adapt to changing market conditions.
4 Global Rapid Thermal Processing Equipment Market Size by Type
The global Rapid Thermal Processing Equipment market is segmented by type, with detailed data for 2025 as follows:
Lamp-based RTP Equipment: This type is projected to have sales of 783.94 million USD in 2025. Lamp-based RTP equipment uses a variety of heating configurations, including IR lamps and halogen lamps, which provide a convenient, efficient, and fast-reacting thermal source that is easily controlled. The advantages include low running costs, high operational reliability, and long average service life.
Laser-based RTP Equipment: Sales for laser-based RTP equipment are forecasted to be 794.73 million USD in 2025. Laser-based systems use laser light to precisely control the heating process, reducing processing time to milliseconds. The high efficiency of the laser annealing process is due to the high absorption of laser energy in the active regions of integrated circuits.
Other RTP Equipment: This category is expected to have sales of 37.05 million USD in 2025. Other RTP equipment includes various other types that do not fall under the lamp-based or laser-based categories but still contribute to the overall market.
Each type of RTP equipment serves specific applications and requirements within the semiconductor industry, contributing to the diverse and expanding market landscape. The market’s segmentation reflects the industry’s need for specialized equipment to meet the varying demands of semiconductor manufacturing processes.
Table Global Rapid Thermal Processing Equipment Sales in Value (M USD) by Type (2020-2025)
2020 | 2021 | 2022 | 2023 | 2024 | 2025 | |
Lamp-based | 343.68 | 378.86 | 599.25 | 693.86 | 723.46 | 783.94 |
Laser-based | 272.70 | 313.22 | 526.65 | 639.79 | 691.82 | 794.73 |
Others | 24.97 | 26.61 | 34.56 | 33.19 | 39.02 | 37.05 |
Total | 641.34 | 718.69 | 1160.45 | 1366.84 | 1454.30 | 1615.72 |
5 Global Rapid Thermal Processing Equipment Market Size by Application
The rapid thermal processing equipment market size for each application varies by 2025. The two main applications are research and development (R&D) and industrial production.
Research and Development (R&D): In 2025, the R&D segment is projected to have sales of 25.32 million USD. RTP equipment plays a crucial role in R&D by enabling quick and efficient testing and prototyping of new materials and processes. This makes it ideal for universities and research centers that require rapid thermal processing capabilities to advance their studies and develop new technologies.
Industrial Production: The industrial production segment is expected to have sales of 1590.40 million USD in 2025. RTP equipment is essential in industrial production for manufacturing high-quality products by precisely controlling heating and cooling processes. It is increasingly adopted in various industries that require efficient and precise heat treatment, such as electronics, semiconductors, automobiles, and solar energy. The adoption of RTP equipment in industrial production is driven by its ability to enhance process efficiency and product quality.
The above data reflects the different uses of RTP equipment in different industries. R&D focuses on innovation and experimentation, while industrial production emphasizes efficiency and quality control. Both applications have made significant contributions to the overall market size and growth of the RTP equipment industry.
Table Global Rapid Thermal Processing Equipment Sales in Value (M USD) by Application (2020-2025)
| 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
R&D | 18.28 | 16.17 | 20.72 | 23.11 | 21.17 | 25.32 |
Industrial Production | 623.06 | 702.52 | 1139.73 | 1343.74 | 1433.13 | 1590.40 |
Total | 641.34 | 718.69 | 1160.45 | 1366.84 | 1454.30 | 1615.72 |
6 Global Rapid Thermal Processing Equipment Market Size by Region
In the global rapid thermal processing equipment market, each region contributes differently to the overall market size in 2025.
North America: In 2025, North America is projected to have a market size of 199.35 million USD. The region’s market is characterized by a strong presence of key manufacturers and a high demand for advanced semiconductor devices. The U.S., in particular, plays a significant role in driving the market due to its robust industrial base and investment in semiconductor manufacturing.
Europe: Europe’s market size is forecasted to be 102.78 million USD in 2025. The region benefits from a well-established industrial sector and a focus on technological advancements. European countries are known for their high-quality manufacturing processes and strict regulatory standards, which contribute to the demand for RTP equipment.
Asia Pacific: The Asia Pacific region is expected to have the largest market size of 1307.01 million USD in 2025. This region’s market is driven by rapid industrialization, urbanization, and government investments in technology. Countries like China, Japan, and South Korea are key players in the semiconductor industry, leading to a high demand for RTP equipment for both R&D and industrial production.
Other Regions: Other regions combined are projected to have a market size of 6.57 million USD in 2025. These regions include emerging markets that are gradually increasing their investment in semiconductor manufacturing and related technologies.
The regional segmentation highlights the global nature of the RTP equipment market, with each region contributing to the overall growth and development of the industry. The market’s diversity across regions underscores the need for tailored strategies to address the specific demands and challenges of each area. The Asia Pacific region’s dominance reflects its growing importance in the global semiconductor industry, while North America and Europe continue to play crucial roles due to their established industrial bases and technological expertise.
Table Global Rapid Thermal Processing Equipment Sales in Value (M USD) by Region (2020-2025)
| 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
North America | 86.50 | 94.12 | 148.88 | 173.27 | 183.07 | 199.35 |
Europe | 45.46 | 47.89 | 73.65 | 88.48 | 94.74 | 102.78 |
Asia Pacific | 507.27 | 574.58 | 933.61 | 1102.91 | 1172.09 | 1307.01 |
Others | 2.12 | 2.11 | 4.31 | 2.18 | 4.39 | 6.57 |
Total | 641.34 | 718.69 | 1160.45 | 1366.84 | 1454.30 | 1615.72 |
7 Global Rapid Thermal Processing Equipment Market: Top 2 Companies Profile
7.1 Applied Materials
Applied Materials, established in 1967 and headquartered in the USA, is a global leader in materials engineering solutions. The company operates worldwide, providing manufacturing equipment, services, and software to the semiconductor, display, and other related industries.
Product Offered: Applied Materials offers the Vantage® Radiance® Plus RTP system, an industry-leading solution for high-volume, atmospheric RTP applications. This system combines world-class RTP chamber technology with a production-proven, low-cost-of-ownership platform.
In the last two years, Applied Materials reported revenues of 1000.48 million USD in 2023 and 1102.42 million USD in 2024. The gross margin for these years was 44.92% in 2023 and 45.21% in 2024, reflecting the company’s strong financial performance and market leadership.
Table Applied Materials Rapid Thermal Processing Equipment Sales, Price, Revenue, and Gross Margin (2019-2024)
Applied Materials | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Sales (Units) | 173 | 196 | 324 | 359 | 383 | 424 |
Price (K USD/Unit) | 2521 | 2502 | 2547 | 2594 | 2612 | 2600 |
Revenue (M USD) | 436.17 | 490.45 | 825.14 | 931.28 | 1000.48 | 1102.42 |
Gross (M USD) | 189.36 | 218.11 | 373.24 | 426.45 | 449.44 | 498.44 |
7.2 Beijing E-Town Semiconductor Technology Co., Ltd.
Beijing E-Town Semiconductor Technology Co., Ltd., established in 2015 and headquartered in China, is a key supplier of plasma and rapid thermal processing equipment to the global semiconductor industry. The company was acquired by E-Town Capital in May 2016 and has since expanded its operations.
The company offers the Helios family of RTP systems, which feature unique double-side heating RTP technology. The Helios XP and Helios C200 systems are designed to meet the technical requirements for RTP processes with different substrate thicknesses and device structures.
In the last two years, Beijing E-Town Semiconductor Technology Co., Ltd. reported revenues of 180.49 million USD in 2023 and 203.90 million USD in 2024. The gross margin was 42.16% in 2023 and 43.59% in 2024, indicating the company’s growing market presence and profitability.
Table Beijing E-Town Semiconductor Technology Co., Ltd. Rapid Thermal Processing Equipment Sales, Price, Revenue, and Gross Margin (2019-2024)
Beijing E-Town Semiconductor Technology Co., Ltd. | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Sales (Units) | 32 | 36 | 55 | 73 | 76 | 85 |
Price (K USD/Unit) | 2192 | 2189 | 2317 | 2365 | 2375 | 2399 |
Revenue (M USD) | 70.13 | 78.80 | 127.46 | 172.63 | 180.49 | 203.90 |
Gross (M USD) | 27.67 | 34.12 | 54.58 | 74.96 | 76.10 | 88.88 |
Gross Margin | 39.46% | 43.30% | 42.82% | 43.42% | 42.16% | 43.59% |
